Considering the ratio of short in the corner of the channel, the small slit & bar design is suitable for four mask processing, and the corner defect can be avoided by tuning bar size.
考虑到沟道转角处的短路几率问题，小的狭缝与遮挡条尺寸设计更加适合于四次淹没光刻工艺，转角处的缺陷可以通过调整遮挡条的尺寸来避免。
When you return to your test results, you should see the defect related to the results in the upper-right corner (Figure 33).
当您返回至您的测试结果时，您应该看到右上角与结果相关的缺陷(图33)。
This paper introduces the theory calculation of shear wave reflection for block corner. And it derives the echo acoustic pressure theory calculation formula for block corner and its shape defect.
阐述了横波在端角反射中的理论方法计算，并推导端角及端角形缺陷的回波声压理论计算公式。
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