abstract:Contact lithography, also known as contact printing, is a form of photolithography whereby the image to be printed is obtained by illumination of a photomask in direct contact with a substrate coated with an imaging photoresist layer.
Wefabricate desired structured surfaces by holographiclithography, plasma etchingandTeflon coating. The performance is evaluatedby measuringthereflectancespectrumandcontactangle.