The invention relates to a conductive polishing pad and a manufacturing method thereof.
本发明涉及一种可导电的抛光垫及其制造方法。
The contact pad has a second part (142), extending away from a first part (141), for further reducing the current density in the conductive layer (120).
所述触板具有远离第一部分(141)而延伸的第二部分(142)，以用于进一步减少导电层(120)中的电流密度。
A bonding pad with an RFID chip disposed thereon is arranged at the central area of the pair of extended conductive arms.
一置晶座和一射频识别(RFID)晶片设置在其上，位于该对导线臂的中心。
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