Finally, the growth of diamond thick film, nano-diamond thin film, and composite diamond film under the control of computer were explained.

最后介绍了在计算机控制之下金刚石厚膜，纳米金刚石薄膜以及复合膜的生长。

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According to the operational performance of grinding film with soft base and characteristic of polyimide, the possibility to make composite grinding film of polyimide with diamond is researched.

根据软基体研磨膜的使用特点和聚酰亚胺的特性，研究聚酰亚胺与金刚石制作复合研磨膜的可能性。

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The result shows that the surface of composite film is very smooth, and the dielectric properties are close to the conventional polycrystalline diamond films.

结果表明，复合结构由普通多晶金刚石薄膜和纳米金刚石薄膜组成，薄膜的表层结构体现了纳米金刚石的特征。

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