A method of determining the highness of an ideal object by beam scanning in the vertical plane and amplitude comparison.

提出了一种采用波束扫描与多波束目标幅度比较相结合实现目标高度测定的方法。

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The experiments , comparison and analysis for the three thickness measurement methods :two-beam diffraction method , contamination spot method and contamination line method were carried out.

前言： 对用电子显微镜测量薄膜厚度的三种方法：双束衍射法、污斑法、污线法进行了实验及比较分析。

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According to comparison between the Gaussian beam and ideal parallel beam, some conclusions are given which ensure the measuring fineness when we make some measurements with the beam diffraction.

根据高斯光束与理想平行光束的对比，给出了若干结论，从而保证了在利用光束衍射进行某些测量工作时的测量精度。

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