Comb Drive Actuator 梳状驱动器
mems comb-drive actuator mems静电梳齿驱动器
comb-drive 梳状驱动
vertical comb drive 垂直梳齿驱动器
comb drive electrode 梳状电极驱动
electrostatic comb-drive structure 静电驱动梳状结构
electrostatic comb-drive resonator 梳齿静电谐振器
electrostatic comb drive resonator 梳齿静电谐振器
electrostatic comb drive structures 静电梳状驱动结构
以上来源于: WordNet
A novel electrostatic microrelay with parallel-comb drive structure and its fabrication process were presented.
介绍了一种新型的、利用并联梳齿结构驱动的静电型微继电器及其制造工艺。
We have studied the basic structure of the lateral comb drive micromechanical silicon gyroscopes and discussed its working laws in details.
研究了硅微型梳状线振动驱动式陀螺仪的基本结构，详细讨论了它的工作原理。
By the sketch of structure of lateral comb drive micromechanical silicon gyroscopes, the authors have fully explained the working laws of this kind of gyroscope.
通过硅微型梳状线振动驱动式陀螺仪的结构示意图，介绍了该陀螺仪的工作特点。
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