提高挂镀锡镀层的均匀度 关 键 词：电镀锡；主盐；添加剂；镀层均匀度 [gap=766]Keywords：tin electroplating；main salt；additive；coating thickness uniformity
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coating thickness and uniformity 包衣厚度和均匀性
The preparation parameters were investigated by evaluation of the film coating thickness and uniformity.
以薄膜包衣厚度和均匀性为指标，考察包衣工艺参数。
Finally, the key design parameters of coating system was obtained, this system can meet ITRS requirements on uniformity of film thickness.
最后给出了镀膜系统的关键设计参数，此镀膜系统能够满足ITRS关于膜厚均匀性的要求。
Influencing factors to the uniformity of coating thickness for alkaline zinc plating have been studied systematically by Hall-cell test.
采用霍尔槽试验对碱性镀锌镀层厚度均一性的影响因素进行了研究。
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