本研究利用固体靶材当作掺杂來源，掺杂不同原子（B、C）进 入TiO 2 薄膜，使用共溅镀（co-sputtering）的方法，期望能将TiO 2 薄膜 的光吸收范围从紫外光范围偏移到可見光范围，而结构仍具有结晶性 良好的anatase相结构并且具有优異的...
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co-sputtering system 共同溅镀系统 ; 共溅镀系统 ; 协同仿真器
reactive magnetron co-sputtering 磁控共溅射
Multi-Target Co-Sputtering System 多靶平行溅镀系统
magnetron co-sputtering 磁控共溅射法 ; 磁控共溅射
magnetron co sputtering 磁控共溅射
co-sputtering deposition 共溅射沉积
DC magnetron co-sputtering 直流磁控共溅射
Dual ion bean co sputtering 双离子束共溅射
Ge doped ZnO thin films were grown by co-sputtering method, and substrate temperature influence on the structure, composition, morphology and photoluminescence of films was studied.
一、使用共溅射法沉积Ge掺杂的ZnO薄膜，研究了基片温度对薄膜的结构与成分、表面形貌以及光致发光性能的影响。
参考来源 - Ge掺杂对ZnO薄膜结构和光学特性的影响·2,447,543篇论文数据，部分数据来源于NoteExpress
The enterprise deyang sunlight electric co. , ltd. has special knowledge within the ranges roasting, thyristor and vacuum coating as well as sputtering.
公司专业从事晶闸管可控硅整流器、烤架以及真空镀膜和溅射业务。
The rich rare earth transition metal amorphous films were prepared by DC double target co sputtering method.
用直流共溅射方法制备了富稀土-过渡族金属非晶态合金薄膜。
Diamond-like carbon DLC thin films were deposited onto si 100 and high speed steel substrates by mid-frequency magnetron sputtering system SP0806AS, Beijing Power tech Co.
采用SP0806AS中频磁控溅射镀膜机，在硅(100)和高速钢基体上，采用双石墨靶在不同功率下沉积了类金刚石薄膜。
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