The optical system of the micro digital sun sensor consists of APS CMOS image sensor and MEMS based diaphragm with pinhole array structure.

微型数字式太阳敏感器光学系统由APS CMOS图像传感器和基于MEMS工艺的小孔阵列式光线引入器组成。

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This paper presented an on-chip integration of SOI (Silicon on insulator) CMOS analog IC and piezoresistive cantilever based on the techniques of MEMS and SOI CMOS.

基于MEMS技术和SOI CMOS技术提出了一个包含放大电路与悬臂梁式压阻传感器的集成化方案。

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An integrated CMOS-compatible Pirani vacuum sensor system has been investigated and developed in this work, combining the traditional Pirani gauge with the MEMS technology.

本文将传统的皮拉尼计与MEMS技术结合起来，研制了一款与标准CMOS工艺兼容的集成皮拉尼传感器系统。

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