Cluster tools have come a long way since we first started installing Linux clusters in 1999.
自从1999年Linux集群首次出现以来，集群工具已经有了长足的进步。
Cluster tools are the critical equipment for semiconductor manufacture, and usually, the bottleneck equipment.
半导体制造中的自动组合装置是半导体制造的关键设备和瓶颈设备。
The manufacture process involves the participation of over hundred procedures and many key equipment, which includes so-called cluster tools.
半导体制造中的自动组合装置是半导体制造的关键设备和瓶颈设备。
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