The relation between characteristics of hot cathode glow discharge and diamond film deposition techniques in hot cathode glow discharge plasma chemical vapor deposition process was discussed.
研究了在热阴极辉光放电等离子体化学气相沉积金刚石膜过程中，热阴极辉光放电特性与金刚石膜沉积工艺的关系。
HAZOP (hazard and operability) is one of the most widely used techniques among the process hazard assessment methods especially in chemical industry.
危险与可操作分析(HAZOP)是目前过程工业应用最为广泛的系统安全评价方法之一。
Then, the structure, function, and some key techniques of intelligent aided support system for process safety operation are introduced according to the characteristic of chemical engineering.
根据化工生产的特点，介绍了化工过程安全运行智能辅助支持系统的结构、功能以及其中的关键技术。
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