Methods of applying specialty ceramic materials to semiconductor processing apparatus, where the specialty ceramic materials are resistant to halogen-comprising plasmas.
本发明提供了一种对于半导体处理中使用的含卤素等离子体耐腐蚀的陶 瓷制品。
The preparation methods of niobate ceramic powders are introduced and the current status of studies and applications of hydrothermal processing were analyzed emphatically.
介绍了目前制备铌酸盐陶瓷粉体所用方法，重点说明了水热法在碱金属铌酸盐陶瓷材料制备中的研究和应用现状。
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