... cathode sputtering technique || 阴极喷涂技术 cathode trap || 阴极陷波电路 cathode vacuum etching || 阴极真空蚀刻 ...
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In this thesis, we demonstrate that this method can decrease the cathode damage to a half degree of the structure without ion trap.
本文设计的加入附加电极的方法大约能将离子轰击对阴极的损伤减少一半。
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