Finally, the photolithography, thin-film deposition, electron beam writing, laser direct writing and excimer laser projection are introduced for binary optics fabrication.
并通过ZEMAX软件模拟,进行离焦分析。 最后,本文介绍了二元光学元件制作的光刻技术和一些新的制作工艺,包括薄膜沉积法、激光束或电子束直接写入法和准分子激光加工法。
参考来源 - 长波红外成像系统复消色差研究Based on binary optics,a new binary optic liquid crystal blazed grating was proposed by combining wave optics and liquid crystal orientation vector theories.
在二元光学理论的基础上,结合波动光学理论和液晶指向矢的计算提出一种新的二元光学液晶闪耀光栅设计。
参考来源 - 二元光学液晶闪耀光栅的特性分析·2,447,543篇论文数据，部分数据来源于NoteExpress
The experience formula, which can better describe the fabrication errors of the deep etched binary optics element, is presented.
将深刻蚀二元光学元件与一般二元光学元件制作误差规律的不同之处进行了分析说明；
Based on the phase modulation of binary optics, the binary phase only masks are used to couple the elliptical Gaussian beam to single mode fiber.
采用二元光学位相调制的基本思想，用二元纯位相型光学系统将椭圆高斯型激光束与单模光纤最佳耦合。
Based on the theory of scalar diffraction, an error model is established to investigate the effect of alignment error on the efficiency of binary optics elements.
本文基于标量衍射理论，建立了简明的对准误差与二元光学器件衍射效率的分析模型，得到了适用于一般位相分布器件的衍射效率的简便实用的计算公式。
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