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This paper introduces the beam profile characteristics of excimer lasers and the beam profilometry.
介绍了准分子激光的波面特性以及波面分析测量技术。
The system can display the beam profile size, emittance and coupling real time, and analyze the image offline.
该系统可以实时显示束团截面形状以及测得的束团截面尺寸、发射度和耦合度，同时可以进行图像离线分析。
The design structure of the distributed beam profile measurement system based on Web control technique was depicted.
阐述了基于网络控制技术的分布式束流剖面测控系统。
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