The effect of beam diffraction accelerates the damage.
损伤污染和衍射效应将导致损伤进一步加剧；
The Stokes parameters were determined by measuring the multiple beam diffraction intensity.
通过测量多光束衍射强度，确定了斯托克斯参量。
The experiments , comparison and analysis for the three thickness measurement methods :two-beam diffraction method , contamination spot method and contamination line method were carried out.
前言： 对用电子显微镜测量薄膜厚度的三种方法：双束衍射法、污斑法、污线法进行了实验及比较分析。
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