beam charge neutralization 射束电荷中和
An analyzer magnet and ion implanter including the magnet pole are also provided so that a method of improving low energy ion beam space charge neutralization in an ion implanter is realized.
本发明亦提供一分析器磁铁以及包括前述磁极的离子布植机,因此实现了一改良一离子布植机中的低能量离子束空间电荷中和的方法。
The electrostatic and magnetic neutralization model has been adopted in solving the initial value problem of the beam-plasma system to obtain the plasma response functions.
采用电荷中和及磁中和模型,求解了束-等离子体系统的初值问题,得到了等离子体的响应函数。
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