• 硼碳氮薄膜 - 引用次数：5

  And other PVD methods, such as sputtering deposition, ion beam assisted deposition, and pulsed laser deposition, are also used to prepare BCN thin films.

  同时，各种PVD方法也被用来制备硼碳氮薄膜，如溅射法、离子束辅助沉积和脉冲激光沉积等。

  参考来源 - 硼碳氮薄膜的制备及其光透过性质研究
• bcn薄膜

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