By using the Monte Carlo method, we calculate the spatial resolution of the scanning electron microscope using low loss energy and coaxial backscattered electrons.
用蒙特卡罗方法模拟计算了利用高能同轴背散射电子的扫描电子显微镜的空间分辨率。
Techniques to be discussed are wavelength and energy dispersive spectrometry, scanning backscattered electron, secondary electron, cathodoluminescence, and X-ray imaging.
将要讨论的技术包括：波长和能量色散谱，扫描背散射电子，二次电子，阴极射线磷光和X射线成像。
Because the image of backscattered electron could reveal structure of the mark as well as the surface, we chose the backscattered electron signal to detect the position of the mark.
由于背散射电子信号的图像既可以显示样品的形貌也可以显示样品的成分所以选择背散射电子信号进行标记位置检测。
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