The characteristics of Auger depth profile as a method for superlattice structure analysis, as well as its limitations, are discussed.
讨论了用俄歇深度剖面分布作超晶格结构分析的特点及其局限性。
The content of this article includes Auger electron emission, surface sensitivity, measurement of Auger electron spectrum, qualitative and quantitative analysis, depth profile etc.
俄歇电子发射，表面灵敏性，俄歇电子谱的测量，定性和定量分析，深度剖析等。
The dominant factor for Auger signal during the interface analysis is the altered layer with a thickness of 30-50A rather than the electron mean free path X.
影响层的厚度为30—50埃，它是进行深度剖面分析时，决定元素俄歇信号强度的第一位重要因素；
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