The results show that, the gas pressure, electrical current, and the virtual breadth of the annular electrode affect the radial distribution of the plasma density and temperature.
结果表明，放电气压、电流以及环电极的有效宽度均影响等离子体密度和温度的径向分布。
But the lessening of virtual breadth of the annular electrode makes the radial distribution of plasma density more unequal, and the total density and the average temperature lower.
但环电极有效宽度的减小使得等离子体密度的分布更不均匀，并使总的密度和平均温度均下降。
A sensor in the utility model adopts a no-leakage PH composite electrode and an annular conductance electrode in which a temperature sensor is arranged.
该装置中的传感器采用无渗漏式PH复合电极和内装温度传感器的环状电导电极。
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