...lectron Beam Projection Lithography 投射式电子束微影术 ; 电子束微影技术 an electron beam lithography 矢量扫描电子束光刻 Electron Beam Liquid Lithography 电子束液态曝光技术 ; 模板加工新方法一一电子束液态曝光技术 ..
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The deflection system of an electron beam lithography tool is used to control deflection scanning of electron beam.
电子束曝光机的偏转系统控制电子束偏转扫描。
They then defined the transistor channel using electron-beam lithography, removing graphene outside of channel regions with an oxygen plasma.
然后在氧等离子体中用电子束刻蚀法去除沟道区石墨烯形成晶体管的沟道。
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