This research starts with the review of historic evolution of AMHS, then focused on more details of the AMHS structure and control method between all subsystems of AMHS.
本文从AMHS系统的历史演变过程开始，详细的分析了AMHS系统地构成结构和各子系统间的控制方式的特点。
Therefore, more and more semiconductor factories apply advanced control policies for AMHS systems.
因此，越来越多的半导体制造厂更加重视AMHS系统的控制策略。
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