In this thesis, the principal and feature of several phase grating alignment systems are introduced firstly; Alignment signal of phase grating alignment mark and the factors of influece of alignment signal are analysed secondly; This paper studies and compares three main factors which affect the diffractive error of alignment mark thirdly; At last, by buiding a formation model of calculating and analsing the asymmetric mark, the diffractive efficiency and alignment errors of the asymmetric mark are studied. The results of the paper are in accord with the datas of the emulator.
本论文首先介绍了各种相位光栅对准系统的原理和特点;接着阐述对准信号以及系统中影响对准信号的因素;其次分析影响相位光栅对准标记衍射效率的主要因素槽深、占空比和反射率;最后通过建立相位光栅对准标记非对称变形的计算模型,分析标记的各级衍射效率和对准误差;并把本文所得结果与仿真软件结果进行比较,两者得到了很好的吻合。
参考来源 - 相位光栅对准技术研究·2,447,543篇论文数据，部分数据来源于NoteExpress
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