For the existing capacitance extraction software can hardly satisfy the needing of actual project, it is still a hard task to improve the accuracy and speed of capacitance extraction.

现有的各种电容提取软件还远远不能满足实际工程的要求，提高电容提取的精度和速度仍是以后的一项艰巨的任务。

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High precision capacitance displacement sensor is used to measure the actual output of moving platform and formed a system of feedback control.

高精度的电容式位移传感器用来测量动平台的实际输出并形成反馈控制系统。

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The new model includes winding leakage, iron losses and distributed capacitance. It has more similarity to the actual model. At last this model is verified by simulation.

这种新的模型既考虑了线圈漏感、又考虑了铁心损耗和分布电容，与实际模型有更大的相似性，最后用仿真结果验证了此模型的有效性。

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