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The distribution of radicals in CHF3/C6H6 electron cyclotron resonance (ECR) plasma was investigated by an actinometric optical emission spectroscopy (AOES).
使用光强标定的发射光谱(AOES)测量了CHF3/C6H6混合气体的微波电子回旋共振(ECR)放电等离子体中基团的分布状态。
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