[ 复数 lithos 第三人称单数 lithoes 现在分词 lithoing 过去式 lithoed 过去分词 lithoed ]
The study and solution of the defect under litho pattern (previous layer contamination)The defect scan is only executed after the litho process, thus most previous layer related defects cannot be captured till litho process are done.
3.前道制程污染所致图形底部缺陷的研究和改善光刻作为图形部门,在工艺完成后会设相关的检查工序。
参考来源 - 半导体光刻工艺中图形缺陷问题的研究及解决·2,447,543篇论文数据,部分数据来源于NoteExpress
N/ADJ/ADV short for lithography, lithograph, lithographic, or lithographically 石印的; 石印地 →see lithograph, lithography
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