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介绍了一种由非硅微加工技术制作的电热微驱动器。
A novel electro-thermal actuator is presented by using non-silicon micro fabrication technology.
本硕士论文对基于非硅基微加工技术的光开关及可调光衰减器的设计制作与分析进行了研究。
This thesis presents a study on the non-silicon based MEMS optical switch and variable optical attenuator.
本发明采用硅与非硅复合方法制备空心金属微针，加工成本低。
The preparation method adopts the silicon and non-silicon compounding method for preparing the hollow metal micro-needle, and the processing cost is low.
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