本文设计的微气压传感器的制作工艺与集成电路工艺兼容，结构上主要包括加热电阻、敏感元件和测试电阻等三部分。

The micro gas pressure sensor designed in this thesis can be fabricated using an IC compatible process, and it is composed of a heating resistor, a sensitive element and a testing resistor.

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通过对霍尔叶片传感器的磁路进行动、静态分析，并结合对集成霍尔敏感电路的分析与仿真，为设计和开发此类传感器提供了更有效的途径。

A more effective technique is provided by analyzing the static and dynamic magnetic field, including analyzing and emulating the integrated Hall-effect sensing circuit.

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最终开发出在微型悬臂梁上集成了电阻加热器、压阻敏感器和纳米针尖的纳机电探针制造技术。

The integration technology of the heater and piezoresistor on one ultrathin cantilever has been finally completed.

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