对单晶硅脆性材料的超精密磨削加工作了大量的实验研究。
In this paper, the experimental investigation is made on the grinding of single brittle materials.
金属结合剂金刚石砂轮广泛应用于硬脆材料的精密和超精密磨削加工。
Metal bonded diamond wheel is widely used in the field of precision and super precision grinding with hard and brittle material.
在超精密切削、磨削、特种加工中，大行程驱动与高精度进给是难以解决的矛盾，也是多坐标超精密加工的难点。
On ultra precision cutting, grinding and non-traditional machining, there is a hard problem between long travel and high precision, especially in multi-coordinate machining.
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