同时采用质量流量控制器、单片机为主体的电路控制系统。
The circuit control system consists of a mass flow controller and a CPU mainly.
热式传感器有很大的滞后环节，在数字质量流量控制器中需要对传感器数据进行补偿。
The thermal sensor had a large lag phase, so the data got by the sensor of digital mass flow controller should be compensated in advance.
具体地说，提供用来补偿流动路径和质量流量控制器的压力环境中的压力瞬变现象的方法和系统。
In particular, a method and system are provided for compensating for pressure transients in the pressure environment of a flow path and mass flow controller.
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