resonance vacuum gauge
... 谐振试验 resonance test 谐振真空计 resonance vacuum gauge 谐振真空计 resonance vacuum gauge ...
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粘滞型谐振真空计 resonant viscosity vacuum gauge
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文中介绍硅微机械谐振真空传感器的特点及配套研制的真空计。
This paper presents the characteristics of silicon micromachining resonance vacuum sensor and a vacuum meter utilizing this sensor.
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