从光学测量角度出发，结合计算机视觉中的摄像机标定方法，解决了大视场短焦距镜头CCD摄像系统的畸变校正问题。
According to the principle of optical measurement, a simple and effective method to measure the distortion of CCD camera with a largefield, short focal length lens is presented.
提出了针对大视场投影光刻物镜畸变的计算方法，并在完成的畸变特性测量装置上进行了8英寸的硅片测量。
The calculative method of the large field projection lithography lens is presented, and on the distortion measuring setup which is accomplished, distortion measurement of 8 inch wafer is completed.
直线畸变：所有三款镜子表现了中等程度的枕形畸变，作为补偿滚球效应的普通措施，并且能提供平滑的视场盘。
Rectilinear distortion: All three binoculars show a moderate amount of pincushion distortion as it is commonly employed to compensate for the globe effect and to provide a smooth panning of the image.
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