挠性衬底安装在圆柱形衬托器上。
A flexible substrates is mounted on the cylindrical susceptor.
在另一个实施方式中，衬托器截面是多边形，且多个衬底安装在衬托器的面上。
In the other embodiment, the susceptor cross section is a polygon with a plurality of substrates mounted on its facets.
在一个实施方式中，处理反应器具有基本上平行于圆柱形衬托器的旋转轴设置的四个复合注入器。
In one embodiment, the process reactor has four composite injectors arranged substantially parallel to the axis of rotation of the cylindrical susceptor.
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