用表面硅微加工工艺研制了一种用于薄膜热容测量的新型微桥量热计。
A micro bridge calorimeter fabricated with silicon surface micro-fabrication technology is developed for testing heat capacity of thin films.
表面微加工工艺采用两种晶体硅芯片基板作为赖以建立层的基础，或者可以在更便宜的玻璃或塑料基板启动。
The surface micromachining process uses either crystal silicon chip substrates as a foundation upon which to build layers, or can be started on cheaper glass or plastic substrates.
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