表面微机械加工使用选择的材料和干法和湿法蚀刻工艺以形成电路层。
Surface micromachining USES select materials and both wet and dry etching processes to form the circuitry layers.
采用表面微机械加工技术允许多达近100精细的应用在一个芯片上的电路图案层的应用。
Using surface micromachining techniques allows applications of up to nearly 100 finely applied layers of circuit patterns on one chip.
在车辆表面微机械加工的传感器还通过倾斜控制提供保护，防止循环翻转，并在防抱死制动系统的使用。
Surface micromachined sensors in vehicles also provide protection against roll-overs via tilt control, and are used in anti-lock braking systems.
应用推荐