首先对MEMS表面加工工艺进行了详细的分析，采用面向过程的方法建立了表面工艺过程的统一模型。
Based on the detailed analysis of MEMS surface micromachining process, the data model of surface micromachining process was built by the process oriented method.
一个完整的MEMS表面加工工艺pcm系统应当包括三个部分：电学参数提取、几何学参数提取和材料特性参数提取。
An entire PCM system of MEMS surface manufacturing process should include three parts: electronic parameters extraction, geometric parameters extraction and material property parameters extraction.
气囊式抛光技术是一种新颖的先进抛光工艺方法，能实现光学表面的确定性加工。
Bonnet tool polishing is a novel and advanced polishing method, which can realize quantitative removing of optical surface.
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