Lithography光刻 Thin Film and Oxidation薄膜及氧化 PECVD在粗化的GaN wafer上沉积SiO2结块问题endura 溅射退火清除表面沾污求助！
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对目前在非致冷微测辐射热计研制中得到成功应用的氧化钒薄膜的特性、制备及表征技术进行综述。
The properties, preparation and characteristics of vanadium oxide thin film, which has been successfully used in un cooled micro bolometer fabrication, are reviewed.
研究了工艺参数对氧化钛薄膜的结构及成分的影响。
The effect of process parameters on the chemical composition and structure of titanium oxide films were studied.
通过制备掺铝氧化锌(ZAO)薄膜及SEM断口观察进行实验验证，证实该修正方法有助于提高膜厚测量精度。
The experiment of measuring the thickness of ZAO film and SEM fracture inspection proves that the method of correction is useful to improve the measurement precision.
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