一种公共分配中心,向自动化晶片处理系统中的各个部分提供所有的电源、气体、化学原料和其它服务。
A common distribution core that provides all electrical power, gases, chemicals, and other services to the sectors of an automated wafer processing system.
全自动化控制系统,高低压压力保护,电源断相及逆相保护,有效保障压缩机运行。
Fully automated control system, high and low pressure protection, power off phase and reverse phase protection, effective protection of compressor.
随着新体制雷达的不断出现以及雷达系统的复杂化,对电源系统的自动化和防护功能提出了越来越高的要求。
As new radar systems are born and the radar is becoming more complex, requirements for automation and protection function of power supply are becoming higher and higher.
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