薄膜应力 [力] membrane stress ; thin film stress ; primary local membrane stress
薄膜应力千涉仪 film-stress interferometer
薄膜应力测试仪 Film Stress Measurement System ; MOS Scan ; Ultra Scan Stress Mapping System
低薄膜应力 low film stress
一次总体薄膜应力 primary general membrane stress
薄膜应力概念 membrane stress concept
薄膜应力的合力 membrane stress resultant
一次局部薄膜应力 primary local membrane stress
薄膜应力测量系统 Film Stress Measurement System
提高金刚石薄膜与铜衬底附着力的关键是减小沉积结束后降温过程中产生的膜基热应力和提高膜基间化学键结合。
Reducing the thermal stress between film and substrate during the descent temperature process and improving chemical bonds combination is a key problem to enhance thee adhesion.
退火使薄膜的折射率将低,释放膜层中的应力,膜层结构更加致密。
And, the annealing process release the stress of the films, which give the film a higher density.
拉曼散射光谱表明随着膜厚增加,薄膜内应力减小。
Raman scattering results indicate that the strain in the films decreases along with the increase in the thickness of the films.
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