...明工程师社区 关键词:光学薄膜；膜厚均匀性；户外照明；平面行星夹具； [gap=388]Key words:optical film ;thickness uniformity ;outdoor lighting ;flat planetary holder ...
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建立了平板型和球面型行星夹具膜厚均匀性的计算模型。
Calculating models for flat and spherical planetary fixture were developed.
研究结果表明，随着靶基距的增加，膜厚均匀性逐渐变好。
The results showed that the thickness uniformity becomes better along with the increasing target-substrate distance.
采用计算机计算了基片处于不同靶-基距时，膜厚均匀性的分布。
Based on it, some expressions of thickness uniformity were discussed, with the distribution of thickness uniformity calculated at different target-substrate distances.
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