利用压阻效应、大(小)挠度理论、膜的应力形变等力学、电学知识设计了一种压阻式微压力传感器。
Based on the piezoresistive effect, large or small deflection theory, thin film's stress theory and other mechanics or electricity knowledge, a piezoresistive micro pressure sensor is designed.
根据模拟结果并结合单晶硅材料和SOI结构的特点，设计出了矩形应力膜单晶硅soi高温压力传感器芯片。
According to the result of simulation and characteristic of monocrystalline silicon SOI structure, a novel high temperature SOI pressure sensor with a rectangle diaphragm was designed.
提出了一种新的光纤压力传感器的设计，该传感器敏感膜采用了台面结构而非传统的平面结构。
A novel pressure sensor with a mesa structure diaphragm is presented, which has a mesa structure diaphragm rather than the planar one.
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