在脉冲激光束和脉冲离子束辐照条件下,针对不同脉冲作用时间和能量密度建立传热模型。
The heat conduction equations were developed for the pulsed laser beams and pulsed ion beams with the various pulse duration and energy density.
着重强调了激光能量密度、脉冲宽度、作用时间等工艺参数与结深、杂质分布以及结电阻之间的密切关联。
The close correlations between laser energy density, pulse duration, interaction time and junction depth, dopant distribution as well as junction resistance are mainly emphasized in this paper.
超短脉冲激光等离子体源作用时间超短,能量密度高,可调谐,易于控制。
The ultrashort pulse laser plasma source works in ultrashort time, with high energy density and is able to be tuned, controlled easily.
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