微型光栅结构薄膜中由于残余应力的存在引起器件在光学和机械性能方面发生显著变化。
Effects of residual stresses on the optical and mechanical performances of MEMS-based microgratings were investigated using finite element simulation method.
并结合其荧光光谱，证实了采用水辅助方法制备出的蜂窝状多孔结构薄膜具有良好的光学性质。
It was found by fluorescence spectra that the honeycomb structure film from water-assisted fabrication keeps good photoluminescence.
试验结果表明，在一定的工艺条件下，通过对基片的加热控制可以获得单一方向生长的柱状晶结构薄膜。
Under the given conditions, we can get films of columnar crystals of growth of single direction by controlled heating of substrate.
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