采用各种分析手段研究了沉积温度和真空退火处理对薄膜结构、表面形貌及光电性能的影响。
The effects of substrate temperature and post deposition vacuum annealing on structural, electrical and optical properties of ZMO: ga thin films were investigated.
本文主要介绍了AZO薄膜的晶体结构、导电机理、光电性能、典型制备技术和应用现状，并对其研究前景进行了展望。
In this paper, the structure, electric mechanism, photoelectric properties, typical preparation techniques and recent progress of AZO films are mainly described.
纳米硅薄膜具有独特的结构和许多优异的光电性能，可望应用于新型光电器件、大规模集成电路等领域。
Nanocrystalline silicon films have special structure and many excellent optoelectronic properties, and are supposed to be applied in optoelectronic devices and large scale integrated circuits.
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