结果表明：等离子体的谱线强度随激光器工作电压、功率密度的增大而增大。
The experimental results shows that the spectral intensity of the plasma enhances significantly with the increase of the operating voltage and the power density.
原子谱线和离子谱线特性分析表明，在鞘层附近区域感应耦合等离子体具有较高的离子密度和较低的电子温度。
It was shown that the ion density is higher and the electron temperature is lower in the vicinity of inductively coupled plasma sheath according to the ionic line and atomic line.
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