另外，我们也得到了样品表面原子级分辨率的STM图像。
纳米级分辨率的运动是当今超精密机床精度指标的特征标志。
Motion resolution in nanometer scale is the important characteristic indicator of ultra-precision machine tool.
本文主要研究利用低线数计量光栅实现具有大量程、纳米级分辨率的位移测量理论及其关键技术。
In this dissertation. The theory and key technologies to measure long-range displacement with nanometer resolution by metrology grating is studied.
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