利用纳米压入测量仪测试了不同组织结构下的硬度和弹性模量。
The hardness and elastic modulus of the alloy were investigated by means of nano-indentation technology.
同时，采用DSC和纳米压痕仪等仪器，测试薄膜的相变温度、显微硬度和弹性模量。
Meanwhile, the phase transition temperature, micro-hardness and elastic modulus were analyzed by DSC, nano-indenter and the other instruments.
纳米压痕试验结果表明，通过改变沉积负偏压和C_2H_2流量可以提高薄膜的硬度和弹性模量。
The nano-indentation results show through changing the deposited voltage and C_2H_2 gas flux rate could increase the hardness and elastic modulus of the films.
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