介绍了一种由非硅微加工技术制作的电热微驱动器。
A novel electro-thermal actuator is presented by using non-silicon micro fabrication technology.
给出基于硅微加工技术的一种新型可变形反射镜的设计和加工方法。
The design and fabrication of a novel deformable mirror based on silicon micromachining technology was presented in this paper.
基于体硅微加工技术设计并制作了一种新型的采用静电驱动的连续面型可变形反射镜。
A novel electrostatic actuated deformable mirror with continuous facet is designed and fabricated by using silicon bulk micromachining technology.
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