介绍了一种由非硅微加工技术制作的电热微驱动器。
A novel electro-thermal actuator is presented by using non-silicon micro fabrication technology.
给出基于硅微加工技术的一种新型可变形反射镜的设计和加工方法。
The design and fabrication of a novel deformable mirror based on silicon micromachining technology was presented in this paper.
用表面硅微加工工艺研制了一种用于薄膜热容测量的新型微桥量热计。
A micro bridge calorimeter fabricated with silicon surface micro-fabrication technology is developed for testing heat capacity of thin films.
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